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| Unsurpassed temperature
uniformity in etching, stripping and cleaning operations
using H2SO4,
HCl and other chemistries |
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QA Series Quartz Constant-Temperature Bath
- Ideal for etching, stripping and cleaning
- Ultra-pure, 99.995% contaminant-free processing vessel
is ideal for critical chemistries
- Externally bonded 5-sided circuit heating element provides
efficient, even heating for improved process yields
- Redundant safety features minimize potential damage caused
by runaway temperatures
- Seamless, sloped run-off flange contributes to a longer
vessel life
- Housing is flame-retardant, stress-relieved polypropylene
(UL-94 V-O rated)
The QA Series Constant-Temperature Bath provides unsurpassed
temperature uniformity: ± 1°C in the 30 - 190°C
temperature range. Because the grid heater is bonded to the
outside and bottom of the pure virgin quartz vessel, it provides
fast, even, efficient heating. The vessel is sealed into a
protective polypropylene housing.
The result is a one-piece, seamless, leak-proof process vessel
with no devitrification. The dramatically sloped run-off design
diverts acids and other process liquids away from the flange.
Safety features include an overtemperature thermocouple, failsafe
power cut-off, with visible and audible alarms, liquid level
sensor tube, and an ultra-reliable snap disk that cuts power
if the temperature exceeds unsafe levels.
QA Series Constant Temperature
Baths are available in many sizes and configurations for operation
with most wafer sizes. Options include a magnetic stirrer,
gravity drain, aspirator (dilution) valve system, and quartz
bubbler. Call to discuss your application with a Terra process
engineer.
| Specifications |
| Materials: |
Internally flame-polished, virgin fused quartz, boron-free
(process vessel); Flame-retardant polypropylene (housing) |
| Electrical: |
208 - 240 VAC, single phase, 50/60Hz, 7 - 20 amps (depending
on size) |
| Process Thermocouple: |
J-type Teflon® encapsulated |
| Insulation: |
High-density alumina silica fiber rated to 1260°C |
| Note: |
Microprocessor controller is required for operation.
See sidebar for capabilities listing. |
Microprocessor Control |
| This chart below outlines these process
capabilities. Call Terra for help in specifying the bath,
controller, and mounting configuration that's ideal for
your application. |
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| Processing
Modules |
Models
below accommodate a single 6" wafer cassett.
Call Terra for other sizes. (Prices include installation) |
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Cat.
# |
$/Each |
| Qa
Series |
7018-28 |
Login |
Corresponding
Controls |
x=Standard
o=Optional |
Heat |
Cool |
Liquid
Level
Sensor
Alarm |
Timer |
Over/
Under
Temp
Alarm |
Pump/
Filter
Control |
Recirculat.
Pump |
Drain
Valve
Control |
Spray
Nozzle
Control |
DI
H2O
Injection |
Cat.
# |
$/Each |
| C1115aLLS |
x |
|
x |
x |
|
|
|
o |
|
|
7018-35 |
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Options
include pneumatic drain valve and magnetic stirrer; call Terra
for details.
Power: 110VAC, 5 Amps—F, A, and RCe. 208VAC, 15 Amps—Qa,
Nb, RCe (optional) |
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Which Material is
Best? |
|
Polypropylene
- Economical plastic with broad chemical compatibility
- Ideal for wet processing station panels
- Loses some chemical resistance at high temperatures
- Suitable for HF and KOH processes
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PVDF (polyvinyldilene fluoride)
- Broader range of chemical resistance than polypropylene
- Suitable for high process temperatures
- Ideal for HF and BOE processes at high temperature
|
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Quartz
- The preferred material for ultra-pure applications
- Provides greater uniformity in heat transfer than
plastic baths—ideal for very tight temperature
control
- Suitable for most chemicals (but not HF acid)
- Hard surfaces won't scuff, stain, or absorb impurities
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PTFE (Teflon®)
- Resistant to an extremely wide range of chemicals
- Perfect for KOH and HF acid (which etch quartz)
- Softer than quartz, so care must be taken to avoid
scuffing, staining
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