Wet Processing Stations and Equipment

Terra's Module Wet Processing and Cleaning Stations provide economical solutions for semiconductor wafer processing.

Select modular wet benches or fully enclosed cabinets, along with a complete line of laminar flow hoods, baths, rinsers, and other equipment.

Modular Wet Processing and Cleaning Systems

	Wet Processing and Cleaning Overview
	Integrated Cabinets
	Modular Stations
	Narrow-Profile Stations
	Modular Stations—System Options

System Accessories

	Gooseneck & Spray Guns
	Custom Applications
	Processing Tanks
	Carboys (Reservoirs)
	Processing Baths Overview
	-	DR Series Wafer Dump Rinser
	-	Qa Series Quartz Constant-Temperature Bath
	-	C Series Stripper Bath
	-	Nb Series Silicon Nitride Etch Bath
	-	A Series Constant Temperature Bath
	-	F Series Subambient Filtered Etch Bath
	-	RCe Recirculating Heater/Chiller
	Robotic Transfer
	Fire Detection System
	Remote Control Hot Plates
	Solvent Spray Booth
	Precision Cleaning Station
	Chemical Storage and Transport
	Enclosed Safety Shower

Preferred Client

Services Include:

•		QuickStart Manuals
•		Price Checker
•		Update Profile

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The QuickQuote planning form makes it easy to specify the system for your requirements

Product Selection

Wet Processing Stations & Equipment

Modular Wet Processing & Cleaning Systems

System Accessories

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All prices and specifications are subject to change without notice. Crating charges apply to selected items.

Terms and Conditions

Precision Fabrication to Your Specs! Call to discuss your requirements for CNC routing and drilling.

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