 |
| Ideal for wafer processing
in such volatile and fuming solutions as J100, A30, R10,
HCl - HNO3 Burmar,
Aqua Regia, and organic strippers |
| |
 |
C Series Stripper Bath
- Ideal for etching, stripping and cleaning
- Seamless quartz vessel is 99.995% contaminant-free
- Externally bonded 5-sided circuit heating element provides
efficient, even heating for improved process yields
- Redundant safety features minimize potential damage caused
by runaway temperatures
- PVDF refluxor and hard-hinged cover improve condensation
of chemical vapors for a cleaner, safer work environment
- Sloped run-off design diverts acid and other process
liquids away from flange
The C Series Constant-Temperature Bath offers the temperature
uniformity and purity of the Qa Series baths, and adds a refluxor
and hinged cover to condense chemical vapors. This feature
makes it ideal for use with volatile and fuming solutions.
Its grid heater is bonded to the outside and bottom of the
pure virgin quartz vessel, ensuring fast, even, efficient
heating. The vessel is sealed into a protective polypropylene
housing. The dramatically sloped "run-off" design diverts
acids and other process liquids away from the flange. Safety
features include an overtemperature thermocouple, failsafe
power cut-off, with visible and audible alarms, liquid level
sensor tube, and an ultra-reliable snap disk that cuts power
if the temperature exceeds unsafe levels.
C Series Stripper Baths are available in many sizes and configurations
for operation with most wafer sizes. Options include a magnetic
stirrer, gravity drain, aspirator (dilution) valve system,
and quartz bubbler. Call to discuss your application with
a Terra process engineer.
| Specifications |
| Materials: |
Internally flame-polished, virgin fused
quartz, boron-free (process vessel); Flame-retardant polypropylene
(housing) |
| Electrical: |
208 - 240 VAC, single phase, 50/60Hz,
7 - 20 amps (depending on size) |
| Process Thermocouple: |
J-type Teflon® encapsulated |
| Insulation: |
High-density alumina silica fiber rated
to 1260°C |
| Note: |
Microprocessor controller is required
for operation. See sidebar for capabilities listing. |
Terra offers a comprehensive range of constant temperature baths,
etching baths, and dump rinsers to meet other size and temperature
requirements. Call to discuss your application.
| Processing
Modules |
Model
below accommodates a single 6" wafer cassett.
Call Terra for other sizes. (Prices include installation) |
 |
Cat.
# |
$/Each |
| C
Series* |
7018-29 |
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|
|
| Corresponding Controls |
x=Standard
o=Optional |
Heat |
Cool |
Liquid
Level
Sensor
Alarm |
Timer |
Over/
Under
Temp
Alarm |
Pump/
Filter
Control |
Recirculat.
Pump |
Drain
Valve
Control |
Spray
Nozzle
Control |
DI
H2O
Injection |
Cat.
# |
$/Each |
| C1115aLLS |
x |
|
x |
x |
|
|
|
o |
|
|
7018-35 |
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|
Options
include pneumatic drain valve and magnetic stirrer; call Terra
for details.
Power: 110VAC, 5 Amps—F, A, and RCe. 208VAC, 15 Amps—Qa,
Nb, RCe (optional) |
