Horizontal Storage

Vertical Storage No. 9130-02, with optional Filter Module and Casters.

Reticle/Photomask Storage Cabinets

• Securely stores and organizes hundreds of reticle or photomask cassettes in a particle-free environment
• Select filter/blower system or place beneath cleanroom ceiling filters to provide continuous laminar flow of particle-free air
• Available in several configurations for secure vertical or horizontal reticle placement
• Ultra-clean materials ensure noncontaminating storage environment
• Optimal storage densities conserve valuable cleanroom floor space, enhance inventory organization

These cabinets are designed specifically to meet the storage requirements of particle-sensitive photomasks and reticles.

A Clean Storage Environment, Inside and Out
Their versatile design lets you incorporate them into an existing cleanroom with ceiling filter/blower modules. Their open-cage construction allows the laminar flow of filtered air to pass downward through the storage area with minimal resistance or turbulence.

For applications without an in-house source of filtered air, Terra offers a 304 stainless steel filter/blower module that mounts on top of the cabinet. It houses a powerful 740 CFM blower and your choice of a 99.99% efficient HEPA filter (rated @ 0.3µm particles) or 99.999% ULPA filter (rated at 0.12 µm particles).

Select between horizontal or vertical storage configurations (see ordering chart for reticle capacities).

Optional casters allow you to transport the photomasks or reticles freely around your facility. Configured as mobile units, these cabinets are especially useful for keeping cassettes clean and organized as you move them from a central storage area (such as Terra's FreeFlow Automated Stocker) to an aligning system or other processing station. Casters raise the cabinet an additional 3" off the floor.

These systems include open-structure shelves mounted on noncontaminating, low-friction runners that provide full access to stored cassettes. Each shelf contains three removable 304 stainless steel trays that provide secure storage of cassettes while allowing the laminar flow of filtered air to pass through the cabinet. Trays include slots on .187" centers for inserting optional reticle dividers, which hold cassettes securely in place and minimize the possibility of vibration that could damage delicate masks and reticles. Electropolishing is available for all 304 stainless steel components to meet ultra-clean material requirements.

Transparent side panels and hinged front double doors are available to fully enclose the cabinets. Select acrylic or static-dissipative PVC, which controls static charges and the particles they attract.

Horizontal Inventory Storage
Clean, Secure Storage

No. 3505-09, shown with optional Filter Module and casters

These cabinets, made of 304 stainless steel, feature an innovative side-mounting system to increase capacity and guarantee secure positioning. Reticle mounts are made of clean, smooth HDPE for optimal protection. The 10° slot angle ensures that reticles seat securely, eliminating chatter and vibration when the cabinet is in motion. Reticle shelves fully extend on noncontaminating, low-friction runners, providing full parts access. Electropolishing is available for all 304 stainless steel components to meet ultra-clean material requirements.

Side panels are acrylic or static-dissipative PVC, which controls static charges and the particles they attract.