Wafer Fab Carts
- A comprehensive range of specialized carts for wafer
fab tools and supplies, including quartz tubes, probes,
injectors, thermocouple rods, and supply bottles
- Electropolished stainless steel surfaces meet the most
stringent cleanliness requirements
- Includes spring-loaded casters for cushioned, low-vibration
rolling
Put Terra's complete manufacturing capabilities to work in
your wafer fab!
In addition to models shown here, carts can be specified
in a variety of plastics, with specialized holding fixtures
to safeguard your sensitive materials during process transfer
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Terra customizes carts to meet your
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Quartz Tube/Thermocouple Cart
Designed for 300mm-diameter quartz tubes up to 1500mm
long. Includes receptacles for thermocouple rods and
two compartments for tool storage. Made of acid-resistant
polypropylene with a rigid steel support. Overall dimensions:
48"W x 24"D x 72"H (excluding handle). Includes four 6" diameter casters.
| Cat.# |
$/Each |
| 9600-25 |
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Neoprene
thermocouple rod supports |
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Safely transport heavy quartz tubes nestled into a polypropylene
retaining platform. Precision-routed cut-outs accommodate
several diameters (150 mm, 200 mm and 300 mm). Includes
flexible quartz tube restraints. Electropolished stainless
steel exterior is easy to wipe down. 6"-diameter high
density neoprene casters ensure smooth, clean rolling.
Overall dimensions: 48"W x 24"D x 36"H (excluding handle)
| Cat.# |
$/Each |
| 9600-17 |
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Injector Cart
Electropolished stainless steel cart features
four 5.25" x 12.5" injector inserts. Overall dimensions:
21"W x 41.55"D x 25.68"H (excluding handle). Includes four 5" diameter casters.
| Cat.# |
$/Each |
| 9600-26 |
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Laser Jig Cart
Electropolished stainless steel cabinet houses
four drawers. Includes rod rail along top perimeter. Includes four 3" diameter casters (two with brakes).
| Cat.# |
$/Each |
| 9600-28 |
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Probe Equipment Cart
Includes three shelves with polyurethane rollers
and retainers for abrasion-free placement of delicate
probes and other fab equipment. Frame and drawer
are electropolished stainless steel. Includes 4"-diameter
high-density neoprene casters. Overall dimensions:
27"W x 24"D x 54"H (excluding handle)
| Cat.# |
$/Each |
| 9600-27 |
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Bottle Cart
Electropolished stainless steel construction,
clean casters, and ergonomic design make this
cart ideal for safely transporting 5' process
gas canisters. Includes retaining chain. Overall
dimensions: 12.3"W x 31"D x 57"H. Front wheels are 8" diameter, rear wheels are 4" diameter.
| Cat.# |
$/Each |
| 9600-18 |
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