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Wafer Box Carts
Model Shown: No. 9600-14
Rod Shelf Cart
Wafer/CE ul-clean pro art class 1 2728

Wafer Box Carts

  • Certified Class 1 compatible by an independent test laboratory
  • UltraClean™ electropolished 304 stainless steel surfaces wipe down clean, without snagging wipers or sloughing particles
  • Angled shelves position wafer boats securely against retaining rails
  • Spring-loaded locking polyurethane casters ensure smooth rolling to protect delicate wafers during transit
  • Standard sizes available for all lot box sizes, including 300mm wafers

These ultra-clean carts are designed specifically for wafer boat transport. Rod shelf models feature .25-diameter rods welded on 2" centers. Perforated shelf models feature .5-diameter cut-outs. Both designs optimize air flow-through and minimize the chance of particle accumulation.

Wafer Box Carts

Wafer Box Carts Also available with sealed, nitrogen-purged plastic shell to create a low-humidity transport and storage environment.

 

Model Shown:
No. 3505-05 Perforated Shelf Cart

Wafer Box Carts
Shelf
Type
Overall Dimensions
(including Handle)
Wafer Box Capacity*  
150mm 200mm 300mm Cat. # $/Each

Rod

29.5"W x 16.1"D x 40"H

4 4 4 9600-14 Login
Perforated
50.5"W x 26.5"D x 42.2"H 12 12 8 3505-05 Login
* Capacities based on the following Empak cassette models: P/N HA 150 (150mm), HA200
(200mm), HA300 (300mm)
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All prices and specifications are subject to change without notice. Crating charges apply to selected items.
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